TY - CHAP A1 - Nenad V. Delić A2 - Jovan P. Šetrajčić A3 - Dragoljub Lj. Mirjanić A4 - Zdravko Ivanković A5 - Dobrivoje Martinov A6 - Snežana Jokić A7 - Ivana Petrevska–Đukić A8 - Dušanka Tešanović A9 - Svetlana Pelemiš ED1 - Kenichi Takahata Y1 - 2009-12-01 PY - 2009 T1 - Single Photon Eigen-Problem with Complex Internal Dynamics N2 - This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters. BT - Micro Electronic and Mechanical Systems SP - Ch. 27 UR - https://doi.org/10.5772/7026 DO - 10.5772/7026 SN - PB - IntechOpen CY - Rijeka Y2 - 2021-12-08 ER -