TY - CHAP A1 - Zoran Djinovic A2 - Milos Tomic A3 - Lazo Manojlovic A4 - Zarko Lazic A5 - Milce Smiljanic ED1 - Kenichi Takahata Y1 - 2009-12-01 PY - 2009 T1 - Non-Contact Measurement of Thickness Uniformity of Chemically Etched Si Membranes by Fiber-Optic Low-Coherence Interferometry N2 - This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters. BT - Micro Electronic and Mechanical Systems SP - Ch. 4 UR - https://doi.org/10.5772/7003 DO - 10.5772/7003 SN - PB - IntechOpen CY - Rijeka Y2 - 2020-09-25 ER -