TY - CHAP A1 - Haochun Tang A2 - Tso-Fu Mark Chang A3 - Chun-Yi Chen A4 - Takashi Nagoshi A5 - Daisuke Yamane A6 - Toshifumi Konishi A7 - Katsuyuki Machida ED1 - Masato Sone ED2 - Kazuya Masu Y1 - 2019-03-06 PY - 2019 T1 - Electrodeposition of Gold Alloys and the Mechanical Properties N2 - Gold and noble metals have been attractive to humans from ancient times because of their beautiful features. In modern society, noble metals, especially gold, play important roles as components in electronic devices because of their high electrical conductivity, chemical stability, and density. In the field of MEMS devices, the demand for continuous miniaturization and sensitivity enhancement is always high. Especially for MEMS accelerometers, sensitivity is affected by Brownian noise, and components with sufficient mass are needed to suppress this noise. Therefore, it is difficult to reduce the dimensions of components to allow further miniaturization of the device. This book presents recent progress in noble metal electrodeposition and applications of gold-based materials in the realization of highly sensitive CMOS-MEMS accelerometers. BT - Novel Metal Electrodeposition and the Recent Application SP - Ch. 5 UR - https://doi.org/10.5772/intechopen.80755 DO - 10.5772/intechopen.80755 SN - 978-1-78985-296-7 PB - IntechOpen CY - Rijeka Y2 - 2021-12-08 ER -