TY - CHAP A1 - Shu-Xia Zhao ED1 - Haikel Jelassi ED2 - Djamel Benredjem Y1 - 2019-02-27 PY - 2019 T1 - Mode Transition and Hysteresis in Inductively Coupled Plasma Sources N2 - Usually called the "fourth state of matter," plasmas make up more than 99% of known material. In usual terminology, this term generally refers to partially or totally ionized gas and covers a large number of topics with very different characteristics and behaviors. Over the last few decades, the physics and engineering of plasmas was experiencing a renewed interest, essentially born of a series of important applications such as thin-layer deposition, surface treatment, isotopic separation, integrated circuit etchings, medicine, etc. Plasma Science & Technology - Basic Fundamentals and Modern Applications presents the basic fundamentals behind plasma physics along with some of their most important modern applications. BT - Plasma Science and Technology SP - Ch. 5 UR - https://doi.org/10.5772/intechopen.76654 DO - 10.5772/intechopen.76654 SN - 978-1-78985-240-0 PB - IntechOpen CY - Rijeka Y2 - 2021-06-21 ER -