TY - CHAP A1 - Salvador Dueñas A2 - Helena Castán A3 - Héctor García A4 - Luis Bailón ED1 - Marius Alexandru Silaghi Y1 - 2012-10-03 PY - 2012 T1 - Electrical Characterization of High-K Dielectric Gates for Microelectronic Devices N2 - This book attempts to bring together the theory and practice of dielectric materials for different kind of industrial applications. Fragmented information on dielectric theory and properties of materials, design of equipment and state of the art in applications relevant to the manufacturing industry should be collated and updated and presented as a single reference volume. In this book relevant and useful information is presented in the quoted literature and covered by our key patent applications. BT - Dielectric Material SP - Ch. 10 UR - https://doi.org/10.5772/50399 DO - 10.5772/50399 SN - PB - IntechOpen CY - Rijeka Y2 - 2020-09-19 ER -