TY - CHAP A1 - Wibool Piyawattanametha A2 - Zhen Qiu ED1 - Nazmul Islam Y1 - 2012-03-28 PY - 2012 T1 - Optical MEMS N2 - The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these materials as well as the most important process steps in bulk micro-machining and modeling. We are very pleased to present this book that contains 18 chapters, written by the experts in the field of MEMS. These chapters are groups into four broad sections of BioMEMS Devices, MEMS characterization and micromachining, RF and Optical MEMS, and MEMS based Actuators. The book starts with the emerging field of bioMEMS, including MEMS coil for retinal prostheses, DNA extraction by micro/bio-fluidics devices and acoustic biosensors. MEMS characterization, micromachining, macromodels, RF and Optical MEMS switches are discussed in next sections. The book concludes with the emphasis on MEMS based actuators. BT - Microelectromechanical Systems and Devices SP - Ch. 12 UR - https://doi.org/10.5772/27612 DO - 10.5772/27612 SN - PB - IntechOpen CY - Rijeka Y2 - 2021-05-16 ER -