TY - CHAP A1 - Tong Guo A2 - Long Ma A3 - Yan Bian ED1 - Nazmul Islam Y1 - 2012-03-28 PY - 2012 T1 - MEMS Characterization Based on Optical Measuring Methods N2 - The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these materials as well as the most important process steps in bulk micro-machining and modeling. We are very pleased to present this book that contains 18 chapters, written by the experts in the field of MEMS. These chapters are groups into four broad sections of BioMEMS Devices, MEMS characterization and micromachining, RF and Optical MEMS, and MEMS based Actuators. The book starts with the emerging field of bioMEMS, including MEMS coil for retinal prostheses, DNA extraction by micro/bio-fluidics devices and acoustic biosensors. MEMS characterization, micromachining, macromodels, RF and Optical MEMS switches are discussed in next sections. The book concludes with the emphasis on MEMS based actuators. BT - Microelectromechanical Systems and Devices SP - Ch. 5 UR - https://doi.org/10.5772/27524 DO - 10.5772/27524 SN - PB - IntechOpen CY - Rijeka Y2 - 2020-09-18 ER -