TY - CHAP A1 - Jun Kawai A2 - Yasukazu Nakaye A3 - Susumu Imashuku ED1 - Viacheslav Kazmiruk Y1 - 2012-03-09 PY - 2012 T1 - Palmtop EPMA N2 - Today, an individual would be hard-pressed to find any science field that does not employ methods and instruments based on the use of fine focused electron and ion beams. Well instrumented and supplemented with advanced methods and techniques, SEMs provide possibilities not only of surface imaging but quantitative measurement of object topologies, local electrophysical characteristics of semiconductor structures and performing elemental analysis. Moreover, a fine focused e-beam is widely used for the creation of micro and nanostructures. The book’s approach covers both theoretical and practical issues related to scanning electron microscopy. The book has 41 chapters, divided into six sections: Instrumentation, Methodology, Biology, Medicine, Material Science, Nanostructured Materials for Electronic Industry, Thin Films, Membranes, Ceramic, Geoscience, and Mineralogy. Each chapter, written by different authors, is a complete work which presupposes that readers have some background knowledge on the subject. BT - Scanning Electron Microscopy SP - Ch. 6 UR - https://doi.org/10.5772/38533 DO - 10.5772/38533 SN - PB - IntechOpen CY - Rijeka Y2 - 2021-09-27 ER -