TY - CHAP A1 - T. Gietzelt A2 - L. Eichhorn ED1 - Mojtaba Kahrizi Y1 - 2012-02-03 PY - 2012 T1 - Mechanical Micromachining by Drilling, Milling and Slotting N2 - Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromachining technology. For this, we have gathered review articles related to various techniques and methods of micro/nano fabrications, like focused ion beams, laser ablation, and several other specialized techniques, from esteemed researchers and scientists around the world. Each chapter gives a complete description of a specific micromachining method, design, associate analytical works, experimental set-up, and the final fabricated devices, followed by many references related to this field of research available in other literature. Due to the multidisciplinary nature of this technology, the collection of articles presented here can be used by scientists and researchers in the disciplines of engineering, materials sciences, physics, and chemistry. BT - Micromachining Techniques for Fabrication of Micro and Nano Structures SP - Ch. 8 UR - https://doi.org/10.5772/34124 DO - 10.5772/34124 SN - PB - IntechOpen CY - Rijeka Y2 - 2020-09-18 ER -