TY - CHAP A1 - Fung Jacky Wen A2 - Po Sheun Chung ED1 - Gorgi Kostovski Y1 - 2011-11-09 PY - 2011 T1 - Design of Circular Dammann Grating: Fabrication and Analysis N2 - The term Lithography encompasses a range of contemporary technologies for micro and nano scale fabrication. Originally driven by the evolution of the semiconductor industry, lithography has grown from its optical origins to demonstrate increasingly fine resolution and to permeate fields as diverse as photonics and biology. Today, greater flexibility and affordability are demanded from lithography more than ever before. Diverse needs across many disciplines have produced a multitude of innovative new lithography techniques. This book, which is the final instalment in a series of three, provides a compelling overview of some of the recent advances in lithography, as recounted by the researchers themselves. Topics discussed include nanoimprinting for plasmonic biosensing, soft lithography for neurobiology and stem cell differentiation, colloidal substrates for two-tier self-assembled nanostructures, tuneable diffractive elements using photochromic polymers, and extreme-UV lithography. BT - Advances in Unconventional Lithography SP - Ch. 6 UR - https://doi.org/10.5772/22054 DO - 10.5772/22054 SN - PB - IntechOpen CY - Rijeka Y2 - 2021-01-21 ER -