TY - CHAP A1 - Mariana Amorim Fraga A2 - Rodrigo Sávio Pessoa A3 - Homero Santiago Maciel A4 - Marcos Massi ED1 - Moumita Mukherjee Y1 - 2011-10-10 PY - 2011 T1 - Recent Developments on Silicon Carbide Thin Films for Piezoresistive Sensors Applications N2 - Silicon Carbide (SiC) and its polytypes, used primarily for grinding and high temperature ceramics, have been a part of human civilization for a long time. The inherent ability of SiC devices to operate with higher efficiency and lower environmental footprint than silicon-based devices at high temperatures and under high voltages pushes SiC on the verge of becoming the material of choice for high power electronics and optoelectronics. What is more important, SiC is emerging to become a template for graphene fabrication, and a material for the next generation of sub-32nm semiconductor devices. It is thus increasingly clear that SiC electronic systems will dominate the new energy and transport technologies of the 21st century. In 21 chapters of the book, special emphasis has been placed on the “materials” aspects and developments thereof. To that end, about 70% of the book addresses the theory, crystal growth, defects, surface and interface properties, characterization, and processing issues pertaining to SiC. The remaining 30% of the book covers the electronic device aspects of this material. Overall, this book will be valuable as a reference for SiC researchers for a few years to come. This book prestigiously covers our current understanding of SiC as a semiconductor material in electronics. The primary target for the book includes students, researchers, material and chemical engineers, semiconductor manufacturers and professionals who are interested in silicon carbide and its continuing progression. BT - Silicon Carbide SP - Ch. 15 UR - https://doi.org/10.5772/20332 DO - 10.5772/20332 SN - PB - IntechOpen CY - Rijeka Y2 - 2021-10-17 ER -