TY - CHAP A1 - Li A2 - Xianming Liu ED1 - Sukumar Basu Y1 - 2011-07-27 PY - 2011 T1 - Infrared Spectroscopic Ellipsometry for Ion-Implanted Silicon Wafers N2 - The exciting world of crystalline silicon is the source of the spectacular advancement of discrete electronic devices and solar cells. The exploitation of ever changing properties of crystalline silicon with dimensional transformation may indicate more innovative silicon based technologies in near future. For example, the discovery of nanocrystalline silicon has largely overcome the obstacles of using silicon as optoelectronic material. The further research and development is necessary to find out the treasures hidden within this material. The book presents different forms of silicon material, their preparation and properties. The modern techniques to study the surface and interface defect states, dislocations, and so on, in different crystalline forms have been highlighted in this book. This book presents basic and applied aspects of different crystalline forms of silicon in wide range of information from materials to devices. BT - Crystalline Silicon SP - Ch. 6 UR - https://doi.org/10.5772/23438 DO - 10.5772/23438 SN - PB - IntechOpen CY - Rijeka Y2 - 2019-11-18 ER -