@incollection{Swaminathan21, author = {Lakshmi Swaminathan}, title = {RF MEMS Switch Fabrication and Packaging}, booktitle = {Nanofibers}, publisher = {IntechOpen}, address = {Rijeka}, year = {2021}, editor = {Brajesh Kumar}, chapter = {15}, doi = {10.5772/intechopen.95003}, url = {https://doi.org/10.5772/intechopen.95003} }