@incollection{Yoon21, author = {Jun-Sik Yoon and Jinsu Jeong and Seunghwan Lee and Junjong Lee and Rock-Hyun Baek}, title = {Gate-All-Around FETs: Nanowire and Nanosheet Structure}, booktitle = {Nanowires}, publisher = {IntechOpen}, address = {Rijeka}, year = {2021}, editor = {Xihong Peng}, chapter = {9}, doi = {10.5772/intechopen.94060}, url = {https://doi.org/10.5772/intechopen.94060} }