@incollection{Djinovic09, author = {Zoran Djinovic and Milos Tomic and Lazo Manojlovic and Zarko Lazic and Milce Smiljanic}, title = {Non-Contact Measurement of Thickness Uniformity of Chemically Etched Si Membranes by Fiber-Optic Low-Coherence Interferometry}, booktitle = {Micro Electronic and Mechanical Systems}, publisher = {IntechOpen}, address = {Rijeka}, year = {2009}, editor = {Kenichi Takahata}, chapter = {4}, doi = {10.5772/7003}, url = {https://doi.org/10.5772/7003} }