@incollection{Lee20, author = {Yi-Lung Cheng and Chih-Yen Lee}, title = {Porous Low-Dielectric-Constant Material for Semiconductor Microelectronics}, booktitle = {Nanofluid Flow in Porous Media}, publisher = {IntechOpen}, address = {Rijeka}, year = {2020}, editor = {Mohsen Sheikholeslami Kandelousi and Sadia Ameen and M. Shaheer Akhtar and Hyung-Shik Shin}, chapter = {11}, doi = {10.5772/intechopen.81577}, url = {https://doi.org/10.5772/intechopen.81577} }