@incollection{Zhao19, author = {Shu-Xia Zhao}, title = {Mode Transition and Hysteresis in Inductively Coupled Plasma Sources}, booktitle = {Plasma Science and Technology}, publisher = {IntechOpen}, address = {Rijeka}, year = {2019}, editor = {Haikel Jelassi and Djamel Benredjem}, chapter = {5}, doi = {10.5772/intechopen.76654}, url = {https://doi.org/10.5772/intechopen.76654} }