@incollection{Li18, author = {Ning Li and Hitoshi Habuka and Yuuki Ishida and Shin-ichi Ikeda and Shiro Hara}, title = {Silicon Epitaxial Reactor for Minimal Fab}, booktitle = {Epitaxy}, publisher = {IntechOpen}, address = {Rijeka}, year = {2018}, editor = {Miao Zhong}, chapter = {6}, doi = {10.5772/intechopen.69986}, url = {https://doi.org/10.5772/intechopen.69986} }