@incollection{Glebovsky18, author = {Vadim Glebovsky}, title = {High-purity Refractory Metals for Thin Film Metallization of VLSI}, booktitle = {Very-Large-Scale Integration}, publisher = {IntechOpen}, address = {Rijeka}, year = {2018}, editor = {Kim Ho Yeap and Humaira Nisar}, chapter = {4}, doi = {10.5772/intechopen.69126}, url = {https://doi.org/10.5772/intechopen.69126} }