@incollection{Nihtianov16, author = {Vahid Mohammadi and Stoyan Nihtianov}, title = {Low‚ÄźTemperature PureB CVD Technology for CMOS Compatible Photodetectors}, booktitle = {Chemical Vapor Deposition}, publisher = {IntechOpen}, address = {Rijeka}, year = {2016}, editor = {Sudheer Neralla}, chapter = {6}, doi = {10.5772/63344}, url = {https://doi.org/10.5772/63344} }