@incollection{Poenar12, author = {Ciprian Iliescu and Daniel P. Poenar}, title = {PECVD Amorphous Silicon Carbide (α-SiC) Layers for MEMS Applications}, booktitle = {Physics and Technology of Silicon Carbide Devices}, publisher = {IntechOpen}, address = {Rijeka}, year = {2012}, editor = {Yasuto Hijikata}, chapter = {5}, doi = {10.5772/51224}, url = {https://doi.org/10.5772/51224} }