@incollection{Meijer12, author = {S├ębastien Pezzagna and Jan Meijer}, title = {High-Resolution Ion Implantation from keV to MeV}, booktitle = {Ion Implantation}, publisher = {IntechOpen}, address = {Rijeka}, year = {2012}, editor = {Mark Goorsky}, chapter = {1}, doi = {10.5772/34601}, url = {https://doi.org/10.5772/34601} }