@incollection{Zheng12, author = {Yu-Xiang Zheng and Rong-Jun Zhang and Liang-Yao Chen}, title = {Ellipsometry and Its Applications in Stoichiometry}, booktitle = {Stoichiometry and Materials Science}, publisher = {IntechOpen}, address = {Rijeka}, year = {2012}, editor = {Alessio Innocenti and Norlida Kamarulzaman}, chapter = {3}, doi = {10.5772/34175}, url = {https://doi.org/10.5772/34175} }