@incollection{Guo12, author = {Y. F. Peng and Y. B. Guo}, title = {Surface Characterization and Interfacial Adhesion in MEMS Devices}, booktitle = {Microelectromechanical Systems and Devices}, publisher = {IntechOpen}, address = {Rijeka}, year = {2012}, editor = {Nazmul Islam}, chapter = {6}, doi = {10.5772/27506}, url = {https://doi.org/10.5772/27506} }