@incollection{Medvid’12, author = {Artur Medvid’ and Aleksandr Mycko and Pavels Onufrijevs and Edvins Dauksta}, title = {Application of Nd:YAG Laser in Semiconductors’ Nanotechnology}, booktitle = {Nd YAG Laser}, publisher = {IntechOpen}, address = {Rijeka}, year = {2012}, editor = {Dan C. Dumitras}, chapter = {11}, doi = {10.5772/37093}, url = {https://doi.org/10.5772/37093} }