@incollection{Venugopal12, author = {Gunasekaran Venugopal and Shrikant Saini and Sang-Jae Kim}, title = {Focused Ion Beam Based Three-Dimensional Nano-Machining}, booktitle = {Micromachining Techniques for Fabrication of Micro and Nano Structures}, publisher = {IntechOpen}, address = {Rijeka}, year = {2012}, editor = {Mojtaba Kahrizi}, chapter = {1}, doi = {10.5772/30218}, url = {https://doi.org/10.5772/30218} }