@incollection{Ludwig2011, author = {Christoph Ludwig and Steffen Meyer}, title = {Double Patterning for Memory ICs}, booktitle = {Recent Advances in Nanofabrication Techniques and Applications}, publisher = {InTech}, address = {Rijeka}, year = {2011}, editor = {Cui, Bo}, chapter = {21}, doi = {10.5772/23193}, url = {https://doi.org/10.5772/23193} }