@incollection{Ameen11, author = {Bill Chang and Michael Ameen}, title = {High Mass Molecular Ion Implantation}, booktitle = {Crystalline Silicon}, publisher = {IntechOpen}, address = {Rijeka}, year = {2011}, editor = {Sukumar Basu}, chapter = {5}, doi = {10.5772/24194}, url = {https://doi.org/10.5772/24194} }